Aberration compensation in aplanatic solid immersion lens microscopy

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Aberration compensation in aplanatic solid immersion lens microscopy.

The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to re...

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Higher Resolution Microscopy System Based on Aplanatic Solid Immersion Lens

The solid immersion lens (SIL), invented by Mansfield and Kino in 1990 [1], attracts potential application in the field of imaging solid state devices, where the structures are buried deep into the substrate such as in integrated circuits. This is due to the ability of SIL to provide sub-surface imaging with better resolution than a conventional microscopy system. Many papers have dealt with th...

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Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

0026-2714/$ see front matter 2012 Elsevier Ltd. A http://dx.doi.org/10.1016/j.microrel.2012.06.026 ⇑ Corresponding author. Tel.: +1 617 353 9370. E-mail address: [email protected] (Y. Lu). Aplanatic solid immersion lens (SIL) microscopy is required to achieve the highest possible resolution for next generation silicon IC backside inspection and failure analysis. However, aplanatic SILs are very sus...

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Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits

Current state-of-the-art in backside fault isolation and logic analysis utilizes solid immersion lens (SIL) imaging in the central configuration. An attractive advancement is the development and integration of an aplanatic SIL, which allows significant improvement in resolution, signal acquisition and isolation capabilities, especially for the 22 nm node and beyond. However, aplanatic SIL confi...

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Thermal Microscopy with a Microfabricated Solid Immersion Lens

The spatial resolution of infrared thermometry is limited by diffraction to dimensions close to the wavelength of the collected infrared radiation, typically 5 μm at room temperatures. Thermal properties variations, temperature gradients, and defects with dimensions smaller than the diffraction limit are inaccessible to far-field infrared thermometry. This work demonstrates a near-field method ...

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ژورنال

عنوان ژورنال: Optics Express

سال: 2013

ISSN: 1094-4087

DOI: 10.1364/oe.21.028189